Hoʻohana nui ʻia ka WF6 ma ke ʻano he mea maka no ka hoʻoheheʻe ʻana i ka mahu (CVD) kaʻina o ka tungsten metala i ka ʻoihana uila. ʻO WSi2 i hana ʻia mai WF6 hiki ke hoʻohana ʻia ma ke ʻano he wiring mea i loko o ka nui-scale integrated circuits (LSI), a hiki ke hoʻohana ʻia ma ke ʻano he mea maka no nā electrodes semiconductor, fluorine Raw mea no nā mea kemika, polymerization catalysts, optical materials, etc.